Title :
38 GHz Antennas on Micromachined Silicon Substrates
Author :
Marcelli, Romolo ; Dragoman, Mircea ; Neculoiu, Dan ; Giacomozzi, Flavio ; Muller, Alexandru ; Nitescu, N.
Author_Institution :
M2T - Microwave Microsystems Technology, CNR - Institute for Microelectronics and Microsystems, Rome Section, Via del Fosso del Cavaliere 100, 00133 Roma, Italy. Phone: +39 06 4993.4536; E-mail: r.marcelli@psm.rm.cnr.it
Abstract :
A new configuration of a double folded double slot CPW feed micromachined antenna array was realized on a 1.5 ¿m thin three-layer dielectric membrane fabricated on a silicon substrate. The antenna was designed for an operating frequency of 38 GHz, and the double folded configuration was used for minimizing the membrane extension.
Keywords :
Aluminum; Antenna measurements; Antenna radiation patterns; Biomembranes; Coplanar waveguides; Dielectric substrates; Feeds; Millimeter wave technology; Silicon; Slot antennas;
Conference_Titel :
Microwave Conference, 2001. 31st European
Conference_Location :
London, England
DOI :
10.1109/EUMA.2001.339125
