• DocumentCode
    2165929
  • Title

    Manipulation of Dispersion Properties of Two-dimensional Photonic Crystal Slab Waveguides by Atomic Layer Deposition

  • Author

    Gaillot, D.P. ; Graugnard, E. ; Blair, J. ; Dunham, S. ; Neff, C.W. ; Yamashita, T. ; Summers, C.J.

  • Author_Institution
    Georgia Inst. of Technol., Atlanta
  • fYear
    2007
  • fDate
    17-22 June 2007
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    In addition to the growing interest within the semiconductor industry, atomic layer deposition (ALD) has also become an attractive tool to engineer and manipulate with extreme precision the complex dielectric architecture of three-dimensional photonic crystals (PCs). Very recently, we proposed to apply this technique to 2D PC slab waveguides.
  • Keywords
    atomic layer deposition; optical waveguides; photonic crystals; 2D photonic crystal slab waveguides; atomic layer deposition; dispersion properties; Atomic layer deposition; Dielectrics; Frequency; Lattices; Materials science and technology; Optical superlattices; Optical waveguides; Photonic crystals; Slabs; Time domain analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007. European Conference on
  • Conference_Location
    Munich
  • Print_ISBN
    978-1-4244-0931-0
  • Electronic_ISBN
    978-1-4244-0931-0
  • Type

    conf

  • DOI
    10.1109/CLEOE-IQEC.2007.4386590
  • Filename
    4386590
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2165929