Title :
Manipulation of Dispersion Properties of Two-dimensional Photonic Crystal Slab Waveguides by Atomic Layer Deposition
Author :
Gaillot, D.P. ; Graugnard, E. ; Blair, J. ; Dunham, S. ; Neff, C.W. ; Yamashita, T. ; Summers, C.J.
Author_Institution :
Georgia Inst. of Technol., Atlanta
Abstract :
In addition to the growing interest within the semiconductor industry, atomic layer deposition (ALD) has also become an attractive tool to engineer and manipulate with extreme precision the complex dielectric architecture of three-dimensional photonic crystals (PCs). Very recently, we proposed to apply this technique to 2D PC slab waveguides.
Keywords :
atomic layer deposition; optical waveguides; photonic crystals; 2D photonic crystal slab waveguides; atomic layer deposition; dispersion properties; Atomic layer deposition; Dielectrics; Frequency; Lattices; Materials science and technology; Optical superlattices; Optical waveguides; Photonic crystals; Slabs; Time domain analysis;
Conference_Titel :
Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-0931-0
Electronic_ISBN :
978-1-4244-0931-0
DOI :
10.1109/CLEOE-IQEC.2007.4386590
