Title :
Monolithic silicon optoelectronic biochips
Author :
Misiakos, K. ; Kakabakos, S.E. ; Douvas, A. ; Argitis, P.
Author_Institution :
NCSR "Demokritos", Microelectron. Inst., Athens, Greece
Abstract :
This work presents results on protein detection through a monolithically integrated silicon optoelectronic transducer. Also, we demonstrate the enabling technologies for developing high probe density optical biochips that can be read out without the need of external optical components. Experimental results are presented that demonstrate sensitive protein detection using biotin and protein coated chips as well as probe patterning using biocompatible photoresist.
Keywords :
biomolecular electronics; biosensors; fibre optic sensors; integrated optoelectronics; photolithography; proteins; readout electronics; Si; biocompatible photoresist; biotin; electrical signal readout; enabling technologies; evanescent wave optics; high probe density optical biochips; microarray based biochips; monolithically integrated silicon optoelectronic transducer; optical fibers; portable multi-analyte biosensors; probe patterning; protein coated chips; protein detection; Biomedical optical imaging; Detectors; Light emitting diodes; Optical fibers; Optical sensors; Optical surface waves; Optical waveguides; Photoconductivity; Silicon; Waveguide junctions;
Conference_Titel :
Electron Devices Meeting, 2001. IEDM '01. Technical Digest. International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-7050-3
DOI :
10.1109/IEDM.2001.979511
