DocumentCode :
2166048
Title :
A micromachined integratable thermal reactor
Author :
Quanbo Zou ; Sridhar, U. ; Yu Chen ; Singh, J. ; Seluanayagam, E. ; Titmeng Lim ; Tie Yan ; Rodriguez, I. ; Lesaicherre, M.L.
Author_Institution :
Inst. of Microelectron., Singapore, Singapore
fYear :
2001
fDate :
2-5 Dec. 2001
Abstract :
This paper presents a micromachined thermal reactor. The silicon substrate remains unheated because of the thermal isolation design during thermal cycling of the reaction chamber. The side-heating concept employed has significantly improved in-chamber temperature uniformity. Finite-element-analysis is carried out to optimise the thermal performance. Experimental results have proved that the thermal reactor can easily be integrated with other non-thermal components. Integration of the device with other components or modules of miniaturised total analysis systems (/spl mu/TAS) is very promising.
Keywords :
chemical analysis; finite element analysis; micromachining; micromechanical devices; temperature distribution; DNA polymerase-chain-reaction; Si; Si substrate; finite-element-analysis; in-chamber temperature uniformity; micromachined integratable thermal reactor; miniaturised total analysis systems; reaction chamber thermal cycling; side-heating concept; thermal isolation design; thermal performance optimisation; Etching; Heat transfer; Heating; Inductors; Microelectronics; Parasitic capacitance; Silicon; Temperature distribution; Thermal conductivity; Thermal resistance;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 2001. IEDM '01. Technical Digest. International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-7050-3
Type :
conf
DOI :
10.1109/IEDM.2001.979514
Filename :
979514
Link To Document :
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