Title :
Bulk Silicon Micro-Machined MEM Switches For Millimeter-Wave Applications
Author :
Grenier, K. ; Pons, P. ; Plana, R. ; Graffeuil, J.
Author_Institution :
LAAS/CNRS, 7 av. du Colonel Roche, 31 077 TOULOUSE cedex 4, France; Université Paul Sabatier, 118 Route de Narbonne, 31 062 Toulouse cedex 4, France
Abstract :
This paper deals with the realization of micro-electro-mechanical (MEM) components dedicated to microwave and millimeter-wave applications and focuses on the advantage of using bulk silicon micro-machining. The silicon substrate etching benefits have been demonstrated through both electromagnetic simulations and measurements of a single MEM switch. Important improvements in term of insertion loss and isolation have been obtained. Further developments in term of distributed switches are addressed.
Keywords :
Biomembranes; Bridge circuits; Communication switching; Conductors; Coplanar waveguides; Design methodology; Insertion loss; Silicon; Switches; Voltage;
Conference_Titel :
Microwave Conference, 2001. 31st European
Conference_Location :
London, England
DOI :
10.1109/EUMA.2001.339132
