• DocumentCode
    2166643
  • Title

    Correlations of vibrational frequencies with VO4 defect in irradiated silicon

  • Author

    Sarlis, N.V. ; Londos, C.A. ; Fytros, L.G.

  • Author_Institution
    Dept. of Phys., Athens Univ., Greece
  • Volume
    1
  • fYear
    1997
  • fDate
    7-11 Oct 1997
  • Firstpage
    59
  • Abstract
    This paper reports infrared spectroscopy studies on oxygen related defects in Czochralsky grown neutron irradiated Silicon material subsequently submitted to heat treatment. The sequential formation of various VOn (n=1,2,3,4) defects according to the reaction process VO→VO2→VO3→VO4 is investigated. We argue that on increasing the annealing temperature different sites for the addition of oxygen atoms become available, triggering for n>2 two parallel formation sequencies in relation with VO3 and VO4 defects. Thus in the first sequence the oxygen atoms are added in adjacent sites to VO2 defect although in the second sequence the oxygen atoms are added in the same vacant site of VO2 defect
  • Keywords
    annealing; elemental semiconductors; impurity absorption spectra; impurity-vacancy interactions; infrared spectra; localised modes; neutron effects; oxygen; silicon; Czochralski grown neutron irradiated silicon; Si:O; VO4 defect; annealing; heat treatment; infrared spectroscopy; oxygen-vacancy pair; vibrational frequency; Absorption; Annealing; Atomic measurements; Dispersion; Frequency estimation; Infrared spectra; Neutrons; Silicon; Spectroscopy; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
  • Conference_Location
    Sinaia
  • Print_ISBN
    0-7803-3804-9
  • Type

    conf

  • DOI
    10.1109/SMICND.1997.651549
  • Filename
    651549