Electrostatic devices for particle micro-handling

Devices for particle micro-handling using an AC electric field are proposed and experimentally validated. With the application of balanced multi-phase high voltage in the 0.2 kV_ptp to 2 kV_ptp range to a series of encased parallel electrodes with a typical center-to-center pitch length of μm, particles on a thin protecting and insulating film become charged and are conveyed by the created traveling field. Devices with various novel transportation and manipulation features, utilizing multi-phase AC electric fields that instantly generate particle driving forces, have been designed and produced. Their features include newly developed methods for particle conveyance smoothing, grouping, and sorting, as well as two-dimensional handling. Traced particle conveyance characteristics have been studied under the influence of three different voltage profiles, three- and six-phase supply and in diverse environments. Various particle materials with a 5 μm to 400 μm diameter range have been examined in experiments; Fe, Al, glass, and plastic spheres showed the best performance