DocumentCode
2166945
Title
Analytical short-channel effect model for ultra-thin SOI MOSFETs including floating body effects
Author
Adan, A.O. ; Fukushima, Y. ; Higashi, K. ; Kagisawa, A.
Author_Institution
VLSI Dev. Lab., Sharp Corp., Nara, Japan
fYear
1997
fDate
6-9 Oct 1997
Firstpage
106
Lastpage
107
Abstract
Summary form only given. SOI MOSFETs implemented on ultra-thin superficial Si film are regarded as promising candidates for the deep-half micron CMOS generation due to their excellent characteristics. To assess the transistor and technology design, however, a compact analytical model that includes the important floating body effects is needed. In this work, a physics-based analytical model for the threshold voltage Vth, that considers (i) a more general non-uniform channel profile and (ii) also the floating body effects, and parasitic bipolar action, that greatly degrade DIBL, is presented. Threshold lowering in the saturation regime is important since it determines Ioff leakage and standby current. These effects have not been included in previous models, and therefore are limited in their predictions
Keywords
MOSFET; doping profiles; leakage currents; semiconductor device models; silicon-on-insulator; DIBL degradation; Ioff leakage; Si; analytical short-channel effect model; deep-half micron CMOS generation; floating body effects; nonuniform channel profile; parasitic bipolar action; physics-based analytical model; saturation regime; standby current; threshold lowering; threshold voltage; ultra-thin SOI MOSFETs; ultra-thin superficial Si film; Analytical models; CMOS integrated circuits; Character generation; Impact ionization; Implants; MOSFETs; Semiconductor films; Semiconductor process modeling; Threshold voltage; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference, 1997. Proceedings., 1997 IEEE International
Conference_Location
Fish Camp, CA
ISSN
1078-621X
Print_ISBN
0-7803-3938-X
Type
conf
DOI
10.1109/SOI.1997.634955
Filename
634955
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