• DocumentCode
    2166945
  • Title

    Analytical short-channel effect model for ultra-thin SOI MOSFETs including floating body effects

  • Author

    Adan, A.O. ; Fukushima, Y. ; Higashi, K. ; Kagisawa, A.

  • Author_Institution
    VLSI Dev. Lab., Sharp Corp., Nara, Japan
  • fYear
    1997
  • fDate
    6-9 Oct 1997
  • Firstpage
    106
  • Lastpage
    107
  • Abstract
    Summary form only given. SOI MOSFETs implemented on ultra-thin superficial Si film are regarded as promising candidates for the deep-half micron CMOS generation due to their excellent characteristics. To assess the transistor and technology design, however, a compact analytical model that includes the important floating body effects is needed. In this work, a physics-based analytical model for the threshold voltage Vth, that considers (i) a more general non-uniform channel profile and (ii) also the floating body effects, and parasitic bipolar action, that greatly degrade DIBL, is presented. Threshold lowering in the saturation regime is important since it determines Ioff leakage and standby current. These effects have not been included in previous models, and therefore are limited in their predictions
  • Keywords
    MOSFET; doping profiles; leakage currents; semiconductor device models; silicon-on-insulator; DIBL degradation; Ioff leakage; Si; analytical short-channel effect model; deep-half micron CMOS generation; floating body effects; nonuniform channel profile; parasitic bipolar action; physics-based analytical model; saturation regime; standby current; threshold lowering; threshold voltage; ultra-thin SOI MOSFETs; ultra-thin superficial Si film; Analytical models; CMOS integrated circuits; Character generation; Impact ionization; Implants; MOSFETs; Semiconductor films; Semiconductor process modeling; Threshold voltage; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI Conference, 1997. Proceedings., 1997 IEEE International
  • Conference_Location
    Fish Camp, CA
  • ISSN
    1078-621X
  • Print_ISBN
    0-7803-3938-X
  • Type

    conf

  • DOI
    10.1109/SOI.1997.634955
  • Filename
    634955