Title :
Modelling and optimisation for an electrostatic actuation of a valveless micropump using a silicon buckled membrane
Author :
Popescu, Dan S. ; Lerch, Philippe ; Dunare, Camelia ; Dascalu, Dan
Author_Institution :
Dept. of Electron., Univ. Politehnica Bucharest, Romania
Abstract :
An electrostatic actuator for micropumps driving has been designed. Modelling and optimisation of the actuator have been made for obtaining small driving voltages for harmonic oscillations in the kHz frequency range with submicrometer amplitudes and for developing improved external forces
Keywords :
buckling; electrostatic devices; elemental semiconductors; membranes; microactuators; micropumps; silicon; Si; driving voltage; electrostatic actuator; harmonic oscillation; modelling; optimisation; silicon buckled membrane; valveless micropump; Biomembranes; Compressive stress; Electrostatic actuators; Electrostatic analysis; Harmonic analysis; Micropumps; Silicon; Springs; Switches; Voltage;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651570
