Silicon-on-insulator photonic crystal slabs for biosensing

Author

Patrini, M. ; Galli, M. ; Belotti, M. ; Andreani, L.C. ; Stella, A. ; Di Fabrizio, E. ; Froner, E. ; Scarpa, M. ; Peroz, C. ; Chen, Y.

Author_Institution

Univ. di Pavia, Pavia

fYear

2007

fDate

17-22 June 2007

Firstpage

1

Lastpage

1

Abstract

In this work we present preliminary results on the optical response and sensitivity tests of waveguide-based photonic crystal structures acting as biosensors for proteins and oligonucleotides. Several one-and two-dimensional Silicon-on-insulator (SOI) PhCs with lattice constants in the submicron range have been realized by means of electron-beam lithography and reactive ion etching techniques.

Keywords

biosensors; electron beam lithography; lattice constants; photonic crystals; proteins; silicon-on-insulator; slabs; sputter etching; biosensing; electron beam lithography; lattice constants; oligonucleotides; optical response; photonic crystal slabs; proteins; reactive ion etching; sensitivity tests; silicon on insulator; submicron range; waveguide based photonic crystal structures; Biomedical optical imaging; Biosensors; Optical sensors; Optical waveguides; Particle beam optics; Photonic crystals; Proteins; Silicon on insulator technology; Slabs; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007. European Conference on

Conference_Location

Munich

Print_ISBN

978-1-4244-0931-0

Electronic_ISBN

978-1-4244-0931-0

Type

conf

DOI

10.1109/CLEOE-IQEC.2007.4386647

Filename

4386647