Title :
Design of an interface circuit for integrated capacitive sensors
Author :
Yang Wang ; Jun-Ning Chen ; Dao-Ming Ke ; Jiang Hu
Author_Institution :
Dept. of Electron. Sci. & Technol., Anhui Univ., Hefei, China
Abstract :
In this paper, an interface circuit for integrated capacitive sensors is designed and simulated by Spectre of Cadence software with TSMC 0.18μm complementary metal oxide semiconductor (CMOS) process. This circuit converts the capacitance of sensing capacitor to the voltage change based on switched-capacitor circuit. The results show the sensitivity of 1mV/10fF and the circuit removes the effect of bias voltage and amplifier offset, decreases the influence of charge injection and clock feed through.
Keywords :
CMOS integrated circuits; capacitive sensors; switched capacitor networks; Cadence software; Spectre; amplifier offset; bias voltage; charge injection; clock feed through; complementary metal oxide semiconductor process; integrated capacitive sensors; interface circuit; switched-capacitor circuit; CMOS integrated circuits; Capacitance; Capacitive sensors; Capacitors; Electrodes; Operational amplifiers; CMOS; capacitive sensor; interface circuit; op amp; switched-capacitor;
Conference_Titel :
Electronics, Communications and Control (ICECC), 2011 International Conference on
Conference_Location :
Ningbo
Print_ISBN :
978-1-4577-0320-1
DOI :
10.1109/ICECC.2011.6066282
