Title :
High resolution blue laser mastering with inorganic photoresist
Author :
Kouchiyama, Akira ; Aratani, Katsuhisa ; Takemoto, Yoshihiro ; Nakao, Takashi ; Kai, Shinichi ; Osato, Kiyoshi ; Nakagawa, Kenzo
Author_Institution :
Opt. Disc Dev. Div., Sony Corp., Tokyo, Japan
Abstract :
An inexpensive and practical mastering technology was developed by using blue laser optics of 405 nm in wavelength λ and NA=0.95 with an inorganic photoresist. The resist system showed a higher resolution for successful 130 nm pit patterning than that of ordinary organic photoresist systems. Based on this technology, a ROM disc with a recording capacity of 25 GB on a 120 mm diameter surface was mastered at a fast recording speed of 4.92 m/s. The disc showed a reasonable jitter value of 9.3% and a push-pull signal by using conventional readout optics of λ=405 nm and NA=0.85.
Keywords :
CD-ROMs; III-V semiconductors; gallium compounds; jitter; photoresists; semiconductor lasers; wide band gap semiconductors; write-once storage; 120 mm; 130 nm; 25 GB; 4.92 m/s; 405 nm; GaN; GaN blue laser diode; ROM disc recording capacity; blue laser mastering; blue laser optics; disc jitter; inorganic photoresist; laser optics NA; laser wavelength; mastering technology; optical ROM disc mastering; pit patterning; push-pull signal; readout optics; recording speed; resist system resolution; Disk recording; Electron beams; Electron optics; Lithography; Magnetic materials; Optical recording; Optical surface waves; Read only memory; Resists; Substrates;
Conference_Titel :
Optical Memory and Optical Data Storage Topical Meeting, 2002. International Symposium on
Print_ISBN :
0-7803-7379-0
DOI :
10.1109/OMODS.2002.1028556
