High resolution blue laser mastering with inorganic photoresist

Author

Kouchiyama, Akira ; Aratani, Katsuhisa ; Takemoto, Yoshihiro ; Nakao, Takashi ; Kai, Shinichi ; Osato, Kiyoshi ; Nakagawa, Kenzo

Author_Institution

Opt. Disc Dev. Div., Sony Corp., Tokyo, Japan

fYear

2002

fDate

2002

Firstpage

27

Lastpage

29

Abstract

An inexpensive and practical mastering technology was developed by using blue laser optics of 405 nm in wavelength λ and NA=0.95 with an inorganic photoresist. The resist system showed a higher resolution for successful 130 nm pit patterning than that of ordinary organic photoresist systems. Based on this technology, a ROM disc with a recording capacity of 25 GB on a 120 mm diameter surface was mastered at a fast recording speed of 4.92 m/s. The disc showed a reasonable jitter value of 9.3% and a push-pull signal by using conventional readout optics of λ=405 nm and NA=0.85.

Keywords

CD-ROMs; III-V semiconductors; gallium compounds; jitter; photoresists; semiconductor lasers; wide band gap semiconductors; write-once storage; 120 mm; 130 nm; 25 GB; 4.92 m/s; 405 nm; GaN; GaN blue laser diode; ROM disc recording capacity; blue laser mastering; blue laser optics; disc jitter; inorganic photoresist; laser optics NA; laser wavelength; mastering technology; optical ROM disc mastering; pit patterning; push-pull signal; readout optics; recording speed; resist system resolution; Disk recording; Electron beams; Electron optics; Lithography; Magnetic materials; Optical recording; Optical surface waves; Read only memory; Resists; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Memory and Optical Data Storage Topical Meeting, 2002. International Symposium on

Print_ISBN

0-7803-7379-0

Type

conf

DOI

10.1109/OMODS.2002.1028556

Filename

1028556