Title :
Spin-on dopants as lifetime modifier sources in fast recovery epitaxial diodes processing
Author :
Veron, Adrian ; Ohanisian, Madalina ; Ciocea, Dumitru ; Mitroi, Cristian
Author_Institution :
Baneasa SA, Bucharest, Romania
Abstract :
The paper presents the results of an experimental study dedicated to lifetime control in fast recovery epitaxial diodes (FRED) by gold and platinum diffusion from spin-on sources. The main diode parameters, namely reverse recovery time, forward voltage drop and leakage current (especially at high temperatures) are comparatively analyzed. It is shown that platinum and gold offer a different trade-off between these parameters. The final choice of the lifetime modifier is determined by the intended diodes applications
Keywords :
elemental semiconductors; gold; leakage currents; p-i-n diodes; platinum; semiconductor doping; semiconductor epitaxial layers; silicon; FRED; Si:Au; Si:Pt; diffusion; diode parameters; fast recovery epitaxial diodes; forward voltage drop; gold; leakage current; lifetime control; lifetime modifier; lifetime modifier sources; p-i-n diodes; platinum; reverse recovery time; spin-on dopants; Boron; Doping; Gold; Impurities; Leakage current; P-i-n diodes; Plasma temperature; Platinum; Silicon; Voltage control;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651585
