Title :
Properties of ferromagnetic thin films and ferromagnetic multilayers of Ni-Fe/SiO2
Author :
Neamtu, J. ; Coraci, A. ; Buiu, O.
Author_Institution :
Nat. Inst. of Res. & Dev. for Microtechnol., Bucharest, Romania
Abstract :
The properties of Fe, Ni, and permalloy monolayer and alternating Ni-Fe/SiO2 multilayer thin films prepared by high vacuum evaporation and DC sputtering have been investigated. In the case of multilayer thin films the relative permeability at high frequencies is much improved, confirming the existence of a magnetostatic coupling between the 0.2 μm thin magnetic layers. The alternating Ni-Fe/SiO 2 multilayer thin films are available for utilization as magnetoresistive heads and magnetoresistive sensors
Keywords :
Permalloy; ferromagnetic materials; magnetic multilayers; magnetic permeability; magnetic thin films; magnetostatic waves; silicon compounds; sputter deposition; sputtered coatings; vacuum deposited coatings; vacuum deposition; 0.2 mum; DC sputtering; Ni-Fe/SiO2; NiFe-SiO2; alternating Ni-Fe/SiO2 multilayer thin films; ferromagnetic multilayers; ferromagnetic thin films; high frequencies; high vacuum evaporation; magnetoresistive heads; magnetoresistive sensors; magnetostatic coupling; multilayer thin films; permalloy monolayer; relative permeability; Frequency; Iron; Magnetic films; Magnetic multilayers; Magnetoresistance; Magnetostatics; Permeability; Sputtering; Thin film sensors; Transistors;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651596
