Title :
Nanoscale Laser Processing using Near-Field Optics
Author :
Grigoropoulos, Costas P. ; Hwang, David J.
Author_Institution :
California Univ., Berkeley
Abstract :
Confinement of optical energy to small dimensions can be achieved by coupling laser irradiation to near-field scanning optical microscopes. The surface topography, texture, crystalline structure and chemical composition could be modified with lateral feature definition in the nanometer range by coupling nanosecond and femtosecond laser beams to NSOM probes in both apertured and apertureless configurations.
Keywords :
laser ablation; nanotechnology; near-field scanning optical microscopy; surface texture; surface topography; surface treatment; apertured configurations; apertureless configurations; chemical composition; crystalline structure; femtosecond laser beams; laser ablation; nanoscale laser processing; nanosecond laser beams; near-field optics; near-field scanning optical microscopes; surface texture; surface topography; Chemical lasers; Crystallization; Laser beams; Optical coupling; Optical microscopy; Probes; Surface emitting lasers; Surface texture; Surface topography; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-0931-0
Electronic_ISBN :
978-1-4244-0931-0
DOI :
10.1109/CLEOE-IQEC.2007.4386678
