Silicon micro- and nanostructures formed by femtosecond laser pulses

Author

Golovan, L.A. ; Zabotnov, S.V. ; Ostapenko, L.A. ; Ezhov, A.A. ; Lastovkina, M.A. ; Chervyakov, A.V. ; Timoshenko, V.Yu. ; Panov, V.I. ; Kashkarov, P.K. ; Shandybina, G.D.

Author_Institution

Moscow State Univ., Moscow

fYear

2007

fDate

17-22 June 2007

Firstpage

1

Lastpage

1

Abstract

This paper investigates the silicon surfaces structured by femtosecond laser pulses by the scanning electron microscopy (SEM), atomic-force microscopy (AFM), third-harmonic (TH) generation, photoluminescence (PL), and Raman spectroscopy techniques.

Keywords

Raman spectra; atomic force microscopy; elemental semiconductors; high-speed optical techniques; laser beam effects; laser materials processing; nanoparticles; optical harmonic generation; photoluminescence; scanning electron microscopy; silicon; surface treatment; Raman spectroscopy; Si; atomic-force microscopy; femtosecond laser pulses; nanostructures; photoluminescence; scanning electron microscopy; third-harmonic generation; Atom lasers; Atomic beams; Atomic force microscopy; Nanostructures; Optical pulse generation; Optical pulses; Photoluminescence; Scanning electron microscopy; Silicon; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007. European Conference on

Conference_Location

Munich

Print_ISBN

978-1-4244-0931-0

Electronic_ISBN

978-1-4244-0931-0

Type

conf

DOI

10.1109/CLEOE-IQEC.2007.4386679

Filename

4386679