DocumentCode :
2168189
Title :
Vibrating wheel micromechanical gyro
Author :
Greiff, Paul ; Antkowiak, Bernard ; Campbell, James ; Petrovich, Anthony
Author_Institution :
Charles Stark Draper Lab. Inc., Cambridge, MA, USA
fYear :
1996
fDate :
22-26 Apr 1996
Firstpage :
31
Lastpage :
37
Abstract :
Silicon micromechanical gyro performance has progressed to the threshold of useful initial applications, at least 1 deg/s. The vibrating wheel on a gimbal (VWOG) is a new gyro design with the promise of improved manufacturability. With a variety of accelerometers from which to choose, the advent of the silicon gyro begins the era of silicon micromechanical inertial guidance
Keywords :
accelerometers; elemental semiconductors; gyroscopes; micromechanical devices; silicon; Si; VWOG; accelerometers; gimbal; inertial guidance; manufacturability; micromechanical gyro; vibrating wheel; Accelerometers; Electrodes; Etching; Fabrication; Instruments; Laboratories; Large-scale systems; Micromechanical devices; Silicon; Wheels;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Position Location and Navigation Symposium, 1996., IEEE 1996
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-3085-4
Type :
conf
DOI :
10.1109/PLANS.1996.509053
Filename :
509053
Link To Document :
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