A New Topology Optimization Method for Multi-physics Micro Domains

Author

Motiee, Mehrnaz ; Khajepour, Amir ; Mansour, Raafat R.

Author_Institution

Dept. of Mech. & Mechatron. Eng., Univ. of Waterloo, Waterloo, ON

fYear

2008

fDate

12-15 Oct. 2008

Firstpage

106

Lastpage

111

Abstract

In this paper, a novel topology optimization scheme is developed for a systematic design of electro-thermo-mechanical devices employing discrete domain with beam elements. To address the shortcomings of previous related work, frame ground structure is used for discretization and real-coded genetic algorithm is employed to solve the optimization problem. The failure criterion is addressed by imposing a buckling constraint. The proposed optimization scheme is implemented and verified with an example of electro-thermo mechanical actuator. The performance of the optimized configuration is further studied with finite element model in ANSYS. The results of this paper confirm that the presented method is a powerful tool to design MEMS structures with on-chip actuation.

Keywords

actuators; finite element analysis; genetic algorithms; mechanical engineering computing; micromechanical devices; topology; MEMS structures; buckling constraint; electro-thermo-mechanical devices; finite element model; frame ground structure; genetic algorithm; on-chip actuation; topology optimization method; Actuators; Design optimization; Electrothermal effects; Fabrication; Finite element methods; Genetic algorithms; Microelectromechanical devices; Micromechanical devices; Optimization methods; Topology;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechtronic and Embedded Systems and Applications, 2008. MESA 2008. IEEE/ASME International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-2367-5

Electronic_ISBN

978-1-4244-2368-2

Type

conf

DOI

10.1109/MESA.2008.4735689

Filename

4735689