Title :
Fabrication of a high throughput apertured tip by the use of birds beak effect: a potential fabrication technique for near-field optical data storage
Author :
Son, Ki-Bong ; Lee, Sung-Q ; Kim, JunHo ; Kim, Jeongyong ; Park, Kang-Ho
Author_Institution :
Basic Res. Lab., Korea Electron. & Telecommun. Res. Inst., Daejeon, South Korea
Abstract :
An optical recording device with an atomic force microscope (AFM) tip, having a sub wavelength aperture, has been considered as one of candidates for Th/in2 data density in near-field optical storage technology. However, the low optical throughput of a near field aperture limits the practical use of the near-field optical storage technique. This limit can be avoided by the enhancement of the throughput of the near-field apertured tip and the development of new recording media with low phase change temperature. To increase the optical throughput of an AFM/near field apertured tip, several fabrication techniques have been proposed so far. In this paper we present a simple fabrication process of a near-field high throughput apertured tip using a bird´s beak effect. Using the bird´s beak effect and field oxidation, a higher throughput aperture and larger cone angled tip are fabricated, simultaneously.
Keywords :
atomic force microscopy; etching; optical storage; oxidation; AFM tip; atomic force microscope tip; bird´s beak effect; fabrication process; field oxidation; high density optical storage; high throughput apertured tip; near-field optical data storage; optical recording; Apertures; Atom optics; Atomic force microscopy; Birds; Memory; Optical device fabrication; Optical devices; Optical microscopy; Optical recording; Throughput;
Conference_Titel :
Optical Memory and Optical Data Storage Topical Meeting, 2002. International Symposium on
Print_ISBN :
0-7803-7379-0
DOI :
10.1109/OMODS.2002.1028627