Title :
Precise track-following control using a MEMS tracking mirror in high-density optical disk drives
Author :
Watanabe, Ichiro ; Ikai, Yoshiaki ; Kawabe, Takayuki ; Kobayashi, Hiroki ; Ueda, Satoshi ; Ichihara, Jun-ichi
Author_Institution :
Fujitsu Labs. Ltd., Kawasaki, Japan
Abstract :
Developed a dual-stage tracking mechanism using a MEMS tracking mirror and used μ-analysis and synthesis to design a controller satisfying multiple desired specifications. The efficiency of the proposed method was demonstrated by an experiment having tracking errors of less than 10 nm. We expect the MEMS tracking mirror to contribute to the creation of high-density optical disk drives.
Keywords :
micromirrors; optical disc storage; optical tracking; MEMS tracking mirror; high-density optical disk drives; multiple desired specifications; track-following control; tracking errors; Actuators; Bars; Design methodology; Disk drives; Micromechanical devices; Mirrors; Motion control; Optical control; Production; Tracking;
Conference_Titel :
Optical Memory and Optical Data Storage Topical Meeting, 2002. International Symposium on
Print_ISBN :
0-7803-7379-0
DOI :
10.1109/OMODS.2002.1028633
