Title :
Integrated antennas on Si, proton-implanted Si and Si-on-quartz
Author :
Chan, K.T. ; Chin, A. ; Chen, Y.B. ; Lin, Y.-D. ; Duh, T.S. ; Lin, W.J.
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
High performance antennas have been realized on proton-implanted Si with 10/sup 6/ /spl Omega/-cm resistivity. Sharp antenna resonance and low loss up to 20 GHz are observed indicating excellent antenna quality. In contrast, very poor antenna characteristics are found on conventional oxide-isolated Si because of the lossy substrate.
Keywords :
antenna radiation patterns; coplanar transmission lines; elemental semiconductors; ion implantation; losses; microwave antennas; silicon; 10 to 20 GHz; 1E6 ohmcm; Si-SiO/sub 2/; Si-on-quartz; Si:H; antenna quality; coplanar transmission line structure; high performance antenna; integrated antennas; lossy substrate; low loss; meander antennas; oxide-isolated Si; planar inverted-F antennas; proton-implanted Si; radiation pattern; sharp antenna resonance; Antenna measurements; Conductivity; Dielectric loss measurement; Dielectric resonator antennas; Dielectric substrates; Loss measurement; Radio frequency; Resonance; Transmission line measurements; Wireless communication;
Conference_Titel :
Electron Devices Meeting, 2001. IEDM '01. Technical Digest. International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-7050-3
DOI :
10.1109/IEDM.2001.979659
