A MEMS-based programmable diffraction grating for optical holography in the spectral domain

Author

Butler, M.A. ; Deutsch, E.R. ; Senturia, S.D. ; Sinclair, M.B. ; Sweatt, W.C. ; Youngner, D.W. ; Hocker, G.B.

Author_Institution

Polychromix Inc., Woburn, MA, USA

fYear

2001

fDate

2-5 Dec. 2001

Abstract

A MEMS-based programmable diffraction grating has been developed that can generate arbitrary spatial grating profiles on a sub-millisecond time scale. Such profiles redirect wavelengths in a polychromatic light beam. These devices can synthesize the spectra of molecules and manipulate signals in a wavelength-division-multiplexed optical telecommunications system.

Keywords

holographic gratings; infrared spectroscopy; micro-optics; optical communication equipment; wavelength division multiplexing; MEMS-based programmable diffraction grating; arbitrary spatial grating profiles; electrically programmable diffraction grating; leverage bending; molecular spectra synthesis; polychromatic light beam; signal manipulation; spectral domain optical holography; sub-millisecond time scale; wavelength redirection; wavelength-division-multiplexed optical telecommunications system; Diffraction gratings; Electrodes; Etching; Holographic optical components; Holography; Optical beams; Optical diffraction; Optical recording; Optical sensors; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2001. IEDM '01. Technical Digest. International

Conference_Location

Washington, DC, USA

Print_ISBN

0-7803-7050-3

Type

conf

DOI

10.1109/IEDM.2001.979660

Filename

979660