Title :
A MEMS-based programmable diffraction grating for optical holography in the spectral domain
Author :
Butler, M.A. ; Deutsch, E.R. ; Senturia, S.D. ; Sinclair, M.B. ; Sweatt, W.C. ; Youngner, D.W. ; Hocker, G.B.
Author_Institution :
Polychromix Inc., Woburn, MA, USA
Abstract :
A MEMS-based programmable diffraction grating has been developed that can generate arbitrary spatial grating profiles on a sub-millisecond time scale. Such profiles redirect wavelengths in a polychromatic light beam. These devices can synthesize the spectra of molecules and manipulate signals in a wavelength-division-multiplexed optical telecommunications system.
Keywords :
holographic gratings; infrared spectroscopy; micro-optics; optical communication equipment; wavelength division multiplexing; MEMS-based programmable diffraction grating; arbitrary spatial grating profiles; electrically programmable diffraction grating; leverage bending; molecular spectra synthesis; polychromatic light beam; signal manipulation; spectral domain optical holography; sub-millisecond time scale; wavelength redirection; wavelength-division-multiplexed optical telecommunications system; Diffraction gratings; Electrodes; Etching; Holographic optical components; Holography; Optical beams; Optical diffraction; Optical recording; Optical sensors; Silicon;
Conference_Titel :
Electron Devices Meeting, 2001. IEDM '01. Technical Digest. International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-7050-3
DOI :
10.1109/IEDM.2001.979660
