Self alignment method of near-field optical probe and micro-lens with VCSEL array

In order to get higher throughput efficiency in read/write operations on high density optical disks, a new optical disk system using near field (NF) probe arrays and VCSEL arrays has been designed. Near field optics with evanescent waves, from which the power decreases exponentially with distance, are adopted in this system using VCSEL arrays, microlens arrays, and near-field probe tip arrays. The most important technology to be developed in this system is a self-alignment technique between the focal point of the high numerical aperture (NA) microlens and the near-field optical probe tip. System design details and a preliminary experimental report of this self-alignment method are given.