Nonlinear regression fits for simulated cycle time vs. throughput curves for semiconductor manufacturing

This paper illustrates an example of the use of a metamodeling approach to simulation through an example of two real world semiconductor manufacturing systems. The meta-model used was from Yang et al. (2004) and has similarities to Cheng and Kleijnen (1999). The approach aims at reducing the amount of simulation work necessary to generate high quality cycle time-throughput (CT-TH) curves. The paper specifically focuses on demonstrating that, in practice, CT-TH curves can deviate significantly from forms currently assumed in the literature (Cheng and Kleijnen 1999).