XY-stage driving electron-beam mastering with nanometer-accuracy positioning for high-density optical disk

Author

Nishida, Tetsuya ; Isshiki, Fumio ; Suzuki, Tatsundo ; Yamaoka, Masahiro ; Miyauchi, Yasushi ; Saga, Hideki ; Hosaka, Sumio

Author_Institution

Central Res. Lab., Hitachi Ltd., Tokyo, Japan

fYear

2002

fDate

2002

Firstpage

28

Lastpage

30

Abstract

Toward the goal of achieving 40-100 Gbit/in² high-density optical recording, multilevel mark-edge recording combined with dual-track reproduction has been proposed under the name SCIPER/RPR (single-carrier independent pit-edge recording/radial-direction partial response). We have designed and developed an XY-stage driving electron beam (EB) mastering system to fabricate a high-density master disk. This time we applied the EB mastering system to the 40-Gbit/in² SCIPER/RPR format. Then, we evaluated the format for pit-edge positioning using an optical filtering technique.

Keywords

electron beam applications; optical disc storage; SCIPER/RPR; XY-stage driving electron beam mastering; dual-track reproduction; high-density master disk; high-density optical disk; high-density optical recording; multilevel mark-edge recording; nanometer-accuracy positioning; optical filtering; pit-edge positioning; radial-direction partial response; single-carrier independent pit-edge recording; Electron beams; Electron optics; Laser beams; Optical distortion; Optical filters; Optical interferometry; Optical modulation; Optical recording; Scanning electron microscopy; Structural beams;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Memory and Optical Data Storage Topical Meeting, 2002. International Symposium on

Print_ISBN

0-7803-7379-0

Type

conf

DOI

10.1109/OMODS.2002.1028704

Filename

1028704