DocumentCode
2172010
Title
Indium phosphide based MEMS end-coupled optical waveguide switches
Author
Pruessner, M.W. ; Datta, M. ; Amarnath, K. ; Kanakaraju, S. ; Ghodssi, R.
Author_Institution
Dept. of Electr. & Comput. Eng., Maryland Univ., College Park, MD, USA
fYear
2005
fDate
8-12 May 2005
Firstpage
110
Lastpage
113
Abstract
Microelectromechanical systems (MEMS) optical waveguide switches are presented. Operating voltages of <7 V, switching speeds of 140 μs, switching losses of 3.2 dB, and 26 dB channel isolation are demonstrated. Resonating cantilever waveguide devices are fabricated for sensing applications.
Keywords
III-V semiconductors; indium compounds; micro-optics; microswitches; optical fabrication; optical waveguide components; semiconductor switches; 140 mus; 26 dB; 3.3 dB; 7 V; channel isolation; indium phosphide based MEMS end-coupled optical waveguide switches; resonating cantilever waveguide devices; sensing applications; switching losses; switching speeds; Communication switching; Indium phosphide; Integrated optics; Micromechanical devices; Optical devices; Optical sensors; Optical switches; Optical waveguides; Stimulated emission; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 2005. International Conference on
ISSN
1092-8669
Print_ISBN
0-7803-8891-7
Type
conf
DOI
10.1109/ICIPRM.2005.1517432
Filename
1517432
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