Title :
Indium phosphide based MEMS end-coupled optical waveguide switches
Author :
Pruessner, M.W. ; Datta, M. ; Amarnath, K. ; Kanakaraju, S. ; Ghodssi, R.
Author_Institution :
Dept. of Electr. & Comput. Eng., Maryland Univ., College Park, MD, USA
Abstract :
Microelectromechanical systems (MEMS) optical waveguide switches are presented. Operating voltages of <7 V, switching speeds of 140 μs, switching losses of 3.2 dB, and 26 dB channel isolation are demonstrated. Resonating cantilever waveguide devices are fabricated for sensing applications.
Keywords :
III-V semiconductors; indium compounds; micro-optics; microswitches; optical fabrication; optical waveguide components; semiconductor switches; 140 mus; 26 dB; 3.3 dB; 7 V; channel isolation; indium phosphide based MEMS end-coupled optical waveguide switches; resonating cantilever waveguide devices; sensing applications; switching losses; switching speeds; Communication switching; Indium phosphide; Integrated optics; Micromechanical devices; Optical devices; Optical sensors; Optical switches; Optical waveguides; Stimulated emission; Voltage;
Conference_Titel :
Indium Phosphide and Related Materials, 2005. International Conference on
Print_ISBN :
0-7803-8891-7
DOI :
10.1109/ICIPRM.2005.1517432
