Title :
Design and analysis of FEM based MEMS accelerometer for detection of postural tremor in Thyrotoxicosis
Author :
Biswas, Santosh ; Gogoi, Anup Kumar
Author_Institution :
Dept. of Electron. & Electr. Eng., Indian Inst. of Technol., Guwahati, Guwahati, India
Abstract :
This paper reports the design and simulation of FEM based MEMS piezoresistive accelerometer used in a strap-down inertial measurement unit (IMU) for detection of postural tremor in Thyrotoxicosis. A square proofmass with four flexures is used in this design. Eight piezoresistors are implanted for sensing the maximum stress and they are connected in the form of a wheatstone bridge with each arm containing two piezoresistors. This type of arrangement minimizes cross axis sensitivity and provides a sensitivity of 6.2mV/g; the dynamic range being (±)2g. MEMS structure has been designed and simulated using FEM based multiphysics software COMSOL 4.3 and the entire IMU unit consist of the accelerometer and associated signal conditioning unit.
Keywords :
accelerometers; bioMEMS; biomedical equipment; biomedical measurement; finite element analysis; medical disorders; piezoresistive devices; resistors; FEM based MEMS piezoresistive accelerometer; FEM based multiphysics software COMSOL 4.3; FEM-based MEMS accelerometer analysis; FEM-based MEMS accelerometer design; associated signal conditioning unit; flexures; maximum stress sensor; piezoresistors; postural tremor detection; square proofmass; strapdown inertial measurement unit; thyrotoxicosis; wheatstone bridge; Piezoresistive accelerometer; cross axis sensitivity; thyrotoxicosis;
Conference_Titel :
Advanced Electronic Systems (ICAES), 2013 International Conference on
Conference_Location :
Pilani
Print_ISBN :
978-1-4799-1439-5
DOI :
10.1109/ICAES.2013.6659372
