Title :
Polymer Pillars as Optical I/O for Gigascale Chips using Mirror-Terminated Waveguides
Author :
Ogunsola, O.O. ; Thacker, H.D. ; Bachim, B.L. ; Bakir, M.S. ; Gaylord, T.K. ; Meindl, J.D.
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA
Abstract :
Polymer pillars are chip-level optical I/Os that provide spatial confinement of light propagating between a chip and a board/substrate. The integration of polymer pillars and mirror-terminated waveguides is presented. Pillars are fabricated directly above the metallized anisotropically-etched silicon sidewalls that terminate the waveguides. The mirror angle is 54.74deg, yet the presence of the pillar produces a 90deg bending of the light. Enabled by mirror-terminated waveguides, polymer pillars represent a promising optical I/O technology for GSI
Keywords :
integrated optics; optical interconnections; optical waveguides; polymers; GSI; anisotropically-etched silicon sidewalls; chip-level optical I/O; gigascale chips; light bending; light propagation; metallized silicon sidewalls; mirror-terminated waveguides; polymer pillars integration; spatial confinement; Bandwidth; Couplers; Geometrical optics; High speed optical techniques; Metallization; Optical interconnections; Optical polymers; Optical waveguides; Substrates; Vertical cavity surface emitting lasers;
Conference_Titel :
Interconnect Technology Conference, 2006 International
Conference_Location :
Burlingame, CA
Print_ISBN :
1-4244-0104-6
DOI :
10.1109/IITC.2006.1648679
