Title :
Characterizations of Rectangular Coaxial Line Fabricated on Silicon Substrate
Author :
Xiong, Yong Zhong ; Huailin, Liao ; Jinglin, Shi ; Rustagi, Subhash C.
Author_Institution :
VSLI Circuit Design & Test Department, Institute of Microelectronics, 11 Science Park Road, Singapore Science Park II, Singapore 117685. Tel: (65) 6770-5379, Fax: (65)67745754, e-mail: yongzhong@ime.a-star.edu.sg
Abstract :
Miniature Rectangular Coaxial Lines (RCL) fabricated on silicon substrate using standard silicon 0.18um CMOS processing technologies are achieved. Also a valid method for de-embedding test structure is proposed. The measured results show that the insertion loss of 1.7dB/mm and the return loss of 10dB at 20GHz are obtained. It is believed that the RCL with high isolation and low insertion loss will be very useful for high performance and low cost silicon-based RFIC design.
Keywords :
CMOS process; CMOS technology; Coaxial components; Costs; Insertion loss; Isolation technology; Loss measurement; Performance loss; Silicon; Testing;
Conference_Titel :
Microwave Conference, 2002. 32nd European
Conference_Location :
Milan, Italy
DOI :
10.1109/EUMA.2002.339429
