Title :
Modeling of Inverted Coupled Microstrip Lines Fabricated using MEMS Technology
Author :
Richardson, A. ; Martoglio, L. ; Cirio, L. ; Richalot, E. ; Lissorgues-Bazin, G. ; Picon, O.
Author_Institution :
Université de Marne-la-Vallée, Bâtiment Copernic, rue Galilée, 77454 Marne-la-vallée-France
Abstract :
3D electromagnetic simulations of a new low loss and low cost microstrip MEMS technology are presented in order to design passive components. First, the experimental validation of these simulation methods is presented. Then, electrical parameters and coupling coefficient are calculated for the inverted coupled lines on glass and on silicon. The characteristics of the two types of lines are finally compared.
Keywords :
Attenuation; Costs; Electromagnetic fields; Finite difference methods; Glass; Micromechanical devices; Microstrip components; Radio frequency; Silicon; Time domain analysis;
Conference_Titel :
Microwave Conference, 2002. 32nd European
Conference_Location :
Milan, Italy
DOI :
10.1109/EUMA.2002.339432