Title :
Design of a CMOS-MEMS Diffraction Grating for Near-Infrared Spectroscopy of Biomolecules
Author :
Losoya-Leal, A. ; Camacho-León, S. ; Martínez-Chapa, S.O.
Author_Institution :
Dept. of Electr. & Comput. Eng., Tecnol. de Monterrey (ITESM), Monterrey, Mexico
fDate :
Sept. 28 2010-Oct. 1 2010
Abstract :
This paper discusses the design of a CMOS-MEMS diffraction grating for a micro spectrophotometer with application in non-invasive glucose monitoring based on differential near-infrared spectro photometry. There are typically two factors discussed with respect to diffraction gratings: spectral range and optical resolution. An analysis of the tradeoff between these two parameters was performed for the determination of the geometric characteristics of our grating based on the limitations of the CMOS process.
Keywords :
bioMEMS; diffraction gratings; molecular biophysics; patient monitoring; spectrophotometers; spectroscopy; sugar; CMOS-MEMS diffraction grating; biomolecules; geometric characteristics; micro spectrophotometer; near-infrared spectroscopy; noninvasive glucose monitoring; optical resolution; spectral range; Blood; Diffraction; Diffraction gratings; Gratings; Metals; Monitoring; Sugar; CMOS-MEMS; diffraction grating; microspectrophotometer; non-invasive blood glucose monitoring;
Conference_Titel :
Electronics, Robotics and Automotive Mechanics Conference (CERMA), 2010
Conference_Location :
Morelos
Print_ISBN :
978-1-4244-8149-1
DOI :
10.1109/CERMA.2010.86
