Title :
Design Space Exploration of Z-Axis CMOS-MEMS Accelerometers
Author :
Méndez, A. ; Camacho-León, S. ; Martínez-Chapa, S.O.
Author_Institution :
Dept. of Electr. & Comput. Eng., Tecnol. de Monterrey, Monterrey, Mexico
fDate :
Sept. 28 2010-Oct. 1 2010
Abstract :
The dimensions of a CMOS-MEMS Z-axis accelerometer are varied in a parametric study that pursues to explore the design space of the spring stiffness that can be achieved by this device. The results of the spring stiffness obtained via simulation will be compared to the one obtained via analytical results, to evaluate the accuracy obtained by using the analytical formulas.
Keywords :
CMOS integrated circuits; accelerometers; micromechanical devices; Z-axis CMOS-MEMS accelerometers; design space exploration; spring stiffness; Accelerometers; Analytical models; Capacitance; Sensors; Space exploration; Springs; Topology; CMOS-MEMS; accelerometer;
Conference_Titel :
Electronics, Robotics and Automotive Mechanics Conference (CERMA), 2010
Conference_Location :
Morelos
Print_ISBN :
978-1-4244-8149-1
DOI :
10.1109/CERMA.2010.88
