Title :
In-plane thermoelectric properties of Si/Ge superlattice
Author :
Liu, W.L. ; Borca-Tasciuc, T. ; Liu, J.L. ; Taka, K. ; Wang, K.L. ; Dresselhaus, M.S. ; Chen, G.
Author_Institution :
Dept. of Mech. & Aerosp. Eng., California Univ., Los Angeles, CA, USA
Abstract :
In this paper we report experimental investigation of the in-plane thermoelectric properties of Si/Ge superlattices grown on silicon-on-insulator wafers. A two-wire 3ω method was employed to measure the in-plane thermal conductivity of the superlattice sample investigated. The in-plane Seebeck coefficient and electrical conductivity of the same sample are also measured. Experimental data are compared with the results of theoretical models of carrier transport based on carrier pocket engineering and partial diffuse phonon interface scattering
Keywords :
Seebeck effect; elemental semiconductors; germanium; semiconductor superlattices; silicon; thermal conductivity; thermoelectricity; Si-Ge; Si/Ge superlattice; carrier pocket engineering; carrier transport; electrical conductivity; in-plane Seebeck coefficient; in-plane thermal conductivity; in-plane thermoelectric properties; partial diffuse phonon interface scattering; silicon-on-insulator wafers; Conductivity measurement; Data engineering; Electric variables measurement; Phonons; Scattering; Semiconductor device modeling; Silicon on insulator technology; Superlattices; Thermal conductivity; Thermoelectricity;
Conference_Titel :
Thermoelectrics, 2001. Proceedings ICT 2001. XX International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-7205-0
DOI :
10.1109/ICT.2001.979901
