Short Course 2: Micro- and Nano-Machined Optics

Optical components and systems are affected by this trend, too, which means that miniaturized optical lenses, prisms, gratings, and even artificial materials based on sub-wavelength structures have to be fabricated for a lot of applications. As a consequence, micro and nanolithography is challenged to realize complex optical elements, as well as artificial materials, both on the base of 2-D and 3-D microstructures. This course gives an introduction to micro-and nano-optics, will show the vision and give an overview of the relevant lithographic fabrication technologies. Specific problems and limitations of the technologies will be described as well.