DocumentCode
2179966
Title
VLS growth mechanism of Si-nanowires for flexible electronics
Author
Shakthivel, D. ; Taube, W. ; Raghavan, S. ; Dahiya, R.
Author_Institution
Electronics and Nanoscale Engineering, School of Engineering, University of Glasgow, G12 8QQ, UK
fYear
2015
fDate
June 29 2015-July 2 2015
Firstpage
349
Lastpage
352
Abstract
Nanowires (NWs) are promising building blocks for flexible electronics and sensors and a number of approaches have been used to develop them. Among these, the vapor-liquid-solid (VLS) mechanism has been most appealing as it provides the electronic quality NWs at low fabrication cost. For these reasons, this method plays an important role in many applications including NWs based flexible electronics. The performance of NWs based electronics and sensors depend on their quality and the underlying growth mechanism, which thus far has not attracted much attention. In this paper, we present the physical chemistry model that explains the atomistic aspects of the growth mechanism of silicon nanowires. The mechanistic equations have been derived for various steps involved in a standard VLS growth process. The supersaturation under the steady state conditions has been calculated and utilized to estimate the growth rate of Si-NWs under different temperature conditions. The estimated values are found to be consistent with the reported measured values. The results from our study indicate that the Si-NW growth rate is directly related to the temperature. High-temperatures (∼900°C) lead to longer Si-NWs (tens of microns length). This knowledge about growth conditions for Si-NW will enable better control of Si-NW dimensions and hence will have significant positive impact on using Si-NW in flexible electronics — especially the contact printing of NWs based electronic layers on flexible substrates.
Keywords
Flexible electronics; Kinetic theory; Mathematical model; Nanowires; Sensors; Silicon; Substrates; Flexible elecronics; Kinetic model; Silicon nanowires; VLS mechanism;
fLanguage
English
Publisher
ieee
Conference_Titel
Ph.D. Research in Microelectronics and Electronics (PRIME), 2015 11th Conference on
Conference_Location
Glasgow, United Kingdom
Type
conf
DOI
10.1109/PRIME.2015.7251407
Filename
7251407
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