DocumentCode
2181860
Title
Silicon lattice measurement with an X-ray/optical interferometer in a vacuum [Avogadro constant determination]
Author
Nakayama, K. ; Fujimoto, H. ; Tanaka, M. ; Misawa, G.
Author_Institution
Nat. Res. Lab. of Metrol., Ibaraki, Japan
fYear
1994
fDate
June 27 1994-July 1 1994
Firstpage
510
Lastpage
511
Abstract
A new X-ray/optical interferometer (XROI) has been constructed at NRLM. One feature is reduction of errors in the displacement measurement. For this purpose, we made an optical interferometer for on-line measurement of guiding errors. We report the results of lattice spacing measurement in a vacuum with the upgraded instruments.<>
Keywords
X-ray apparatus; constants; elemental semiconductors; lattice constants; light interferometry; silicon; vacuum techniques; Avogadro constant; NRLM; Si; Si lattice measurement; X-ray/optical interferometer; displacement measurement; guiding errors; lattice spacing measurement; online measurement; reduction of errors; upgraded instruments; vacuum; Computer errors; Displacement measurement; Instruments; Lattices; Optical beams; Optical interferometry; Optical modulation; Optical sensors; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements, 1994. Digest., 1994 Conference on
Conference_Location
Boulder, CO, USA
Print_ISBN
0-7803-1984-2
Type
conf
DOI
10.1109/CPEM.1994.333191
Filename
333191
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