DocumentCode
2181889
Title
Absolute measurements of the densities of silicon crystals in vacuum for a determination of the Avogadro constant
Author
Fujii, K. ; Tanaka, M. ; Nezu, Y. ; Sakuma, A. ; Leistner, A. ; Giardini, W.
Author_Institution
Nat. Res. Lab. of Metrol., Ibaraki, Japan
fYear
1994
fDate
June 27 1994-July 1 1994
Firstpage
508
Lastpage
509
Abstract
Absolute measurements of the densities of 1-kg single-crystal silicon spheres have been performed for a determination of the Avogadro constant. A scanning type optical interferometer was used to measure the diameters of the spheres in vacuum, and the volumes were obtained by fitting the diameters to a series of spherical harmonics. Thickness of oxide layers on the surfaces of the spheres has been determined by using an ellipsometer to evaluate the effect on the density. Total uncertainties of the densities are estimated to be 0.1 ppm.<>
Keywords
constants; diameter measurement; elemental semiconductors; ellipsometry; lattice constants; light interferometry; mass measurement; silicon; vacuum techniques; 1 kg; Avogadro constant; Si; Si crystals; absolute measurement; diameter measurement; ellipsometer; mass measurement; scanning type optical interferometer; spheres; spherical harmonics; thickness; uncertainties; volumes; Crystals; Density measurement; Laboratories; Laser beams; Metrology; Optical interferometry; Optical refraction; Optical variables control; Performance evaluation; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements, 1994. Digest., 1994 Conference on
Conference_Location
Boulder, CO, USA
Print_ISBN
0-7803-1984-2
Type
conf
DOI
10.1109/CPEM.1994.333192
Filename
333192
Link To Document