Title :
Noise performance and chopper frequency in integrated micromachined chopper-detectors in silicon
Author :
Wolffenbuttel, R.F. ; de Graaf, G.
Author_Institution :
Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands
fDate :
June 27 1994-July 1 1994
Abstract :
Recent advances in silicon micromachining technologies enable the fabrication of single-chip optical chopper-detector systems with integrated readout circuits in silicon. The micron-dimensions of the thin-film chopper would allow operation at much higher frequencies compared to conventional choppers. A typical integrated chopper is composed of an electrostatically-actuated comb drive, which displaces a reflecting film over the detector to give alternating transmission and blocking of impinging light onto the integrated photodiode.<>
Keywords :
choppers (circuits); detector circuits; electric sensing devices; elemental semiconductors; integrated circuit technology; micromechanical devices; semiconductor device noise; silicon; Si; chopper frequency; electrostatically-actuated comb drive; impinging light; integrated chopper; integrated micromachined chopper-detectors; integrated photodiode; integrated readout circuits; micromachining technologies; micron-dimensions; noise performance; silicon; single-chip optical chopper-detector; thin-film chopper; Choppers; Frequency; Integrated circuit technology; Integrated optics; Micromachining; Optical device fabrication; Optical films; Optical noise; Silicon; Thin film circuits;
Conference_Titel :
Precision Electromagnetic Measurements, 1994. Digest., 1994 Conference on
Conference_Location :
Boulder, CO, USA
Print_ISBN :
0-7803-1984-2
DOI :
10.1109/CPEM.1994.333225
