Noise performance and chopper frequency in integrated micromachined chopper-detectors in silicon

Author

Wolffenbuttel, R.F. ; de Graaf, G.

Author_Institution

Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands

fYear

1994

fDate

June 27 1994-July 1 1994

Firstpage

449

Lastpage

450

Abstract

Recent advances in silicon micromachining technologies enable the fabrication of single-chip optical chopper-detector systems with integrated readout circuits in silicon. The micron-dimensions of the thin-film chopper would allow operation at much higher frequencies compared to conventional choppers. A typical integrated chopper is composed of an electrostatically-actuated comb drive, which displaces a reflecting film over the detector to give alternating transmission and blocking of impinging light onto the integrated photodiode.<>

Keywords

choppers (circuits); detector circuits; electric sensing devices; elemental semiconductors; integrated circuit technology; micromechanical devices; semiconductor device noise; silicon; Si; chopper frequency; electrostatically-actuated comb drive; impinging light; integrated chopper; integrated micromachined chopper-detectors; integrated photodiode; integrated readout circuits; micromachining technologies; micron-dimensions; noise performance; silicon; single-chip optical chopper-detector; thin-film chopper; Choppers; Frequency; Integrated circuit technology; Integrated optics; Micromachining; Optical device fabrication; Optical films; Optical noise; Silicon; Thin film circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Precision Electromagnetic Measurements, 1994. Digest., 1994 Conference on

Conference_Location

Boulder, CO, USA

Print_ISBN

0-7803-1984-2

Type

conf

DOI

10.1109/CPEM.1994.333225

Filename

333225