Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator

Describes the development of a new type of optical coherence tomography (OCT) probe using an electrostatic micromachine (MEMS) actuator. These devices consist of millimeter scale mirrors resting on micron scale polyimide hinges that are tilted using a linear MEMS actuator, the integrated force array (IFA). The IFA is a parallel network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated from polyimide on silicon wafers using photolithography. These scanners were designed, fabricated and tested for optical displacements at different frequencies and drive voltages. They were then used in the scanning arm of an experimental OCT imaging system to make preliminary images.