Encapsulation and Evaluation of a MEMS-Based Flexible Microelectrode Array for Acute In-Vivo Experiment

Author

Sui, Xiaohong ; Tan, Fei ; Liang, Ting ; Chen, Wei ; Li, Gang ; Ren, Qiushi

Author_Institution

Dept. of Biomed. Eng., Shanghai Jiao Tong Univ., Shanghai, China

fYear

2009

fDate

17-19 Oct. 2009

Firstpage

1

Lastpage

6

Abstract

A novel 16-channel flexible thin-film microelectrode array was fabricated and evaluated for epi-retinal electrical stimulation by MEMS (Micro ElectroMechanical System) processing techniques. It was encapsulated by medical-grade silicone adhesive and suitable for in-vivo application. In-vitro testing results showed that the average impedance of the microelectrode array was uniform at different steps of encapsulation, and the polyimide microelectrode had good biocompatibility with the glial cells. Proper surgery was adopted to implant the microelectrode in the epi-retinal location and the acute in-vivo testing results showed that the amplitude of electrical evoked cortical potential (EECP) could amount to 20 muV with the latency of 12 ms.

Keywords

adhesives; bioMEMS; bioelectric potentials; biomedical electrodes; cellular biophysics; eye; microelectrodes; neurophysiology; prosthetics; surgery; MEMS-based flexible microelectrode array; biocompatibility; electrical evoked cortical potential; encapsulation; epi-retinal electrical stimulation; epi-retinal visual prosthesis; glial cells; medical-grade silicone adhesive; micro electromechanical system; polyimide microelectrode; surgery; time 12 ms; voltage 20 muV; Electrical stimulation; Electromechanical systems; Encapsulation; Impedance; In vitro; Microelectrodes; Micromechanical devices; Polyimides; Testing; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Biomedical Engineering and Informatics, 2009. BMEI '09. 2nd International Conference on

Conference_Location

Tianjin

Print_ISBN

978-1-4244-4132-7

Electronic_ISBN

978-1-4244-4134-1

Type

conf

DOI

10.1109/BMEI.2009.5305136

Filename

5305136