Title :
Simulation of MEMS based micro-gyroscope using CoventorWare
Author :
Khankhua, Suthin ; Ashraf, Muhammad Waseem ; Tayyaba, Shahzadi ; Afzulpurkar, Nitin ; Punyasai, Chumnam
Author_Institution :
Sch. of Eng. & Technol., Asian Inst. of Technol. (AIT), Bangkok, Thailand
Abstract :
This paper presents the design and simulation of MEMS based micro-gyroscope to be used in digital camera for image stabilization. Simulation has been performed using CoventorWare. Proposed model of gyroscope has improved the performance and structure for small vibration amplitude to minimize the mechanical crosstalk. Results show that the capacitance in sense mode, which is detected by variable-gap capacitors, is equal to 2.68 pF in each side of sense mode. Oscillations in drive and sense electrodes with 1-DOF and proof mass with 2-DOF make sure that the proposed model has no common mode, that causes mechanical crosstalk. Damping effect for slide thin film and squeezed thin film has been studied. The presented data provides useful information to fabricate the optimal design of MEMS based micro gyroscope.
Keywords :
cameras; capacitors; crosstalk; damping; electrical engineering computing; electrodes; gyroscopes; microfabrication; micromechanical devices; oscillations; thin films; CoventorWare simulation; DOF; MEMS based microgyroscope; capacitance 2.68 pF; damping effect; digital camera; electrode; image stabilization; mechanical crosstalk; oscillation; slide thin film; small vibration amplitude; squeezed thin film; variable-gap capacitor; Crosstalk; Damping; Educational institutions; Glass; Micromechanical devices; Resonant frequency; Substrates; Capacitors; Finite element; Gyroscope; Tuning fork;
Conference_Titel :
Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology (ECTI-CON), 2011 8th International Conference on
Conference_Location :
Khon Kaen
Print_ISBN :
978-1-4577-0425-3
DOI :
10.1109/ECTICON.2011.5947760
