Simulation of MEMS based micro-gyroscope using CoventorWare

Author

Khankhua, Suthin ; Ashraf, Muhammad Waseem ; Tayyaba, Shahzadi ; Afzulpurkar, Nitin ; Punyasai, Chumnam

Author_Institution

Sch. of Eng. & Technol., Asian Inst. of Technol. (AIT), Bangkok, Thailand

fYear

2011

fDate

17-19 May 2011

Firstpage

22

Lastpage

25

Abstract

This paper presents the design and simulation of MEMS based micro-gyroscope to be used in digital camera for image stabilization. Simulation has been performed using CoventorWare. Proposed model of gyroscope has improved the performance and structure for small vibration amplitude to minimize the mechanical crosstalk. Results show that the capacitance in sense mode, which is detected by variable-gap capacitors, is equal to 2.68 pF in each side of sense mode. Oscillations in drive and sense electrodes with 1-DOF and proof mass with 2-DOF make sure that the proposed model has no common mode, that causes mechanical crosstalk. Damping effect for slide thin film and squeezed thin film has been studied. The presented data provides useful information to fabricate the optimal design of MEMS based micro gyroscope.

Keywords

cameras; capacitors; crosstalk; damping; electrical engineering computing; electrodes; gyroscopes; microfabrication; micromechanical devices; oscillations; thin films; CoventorWare simulation; DOF; MEMS based microgyroscope; capacitance 2.68 pF; damping effect; digital camera; electrode; image stabilization; mechanical crosstalk; oscillation; slide thin film; small vibration amplitude; squeezed thin film; variable-gap capacitor; Crosstalk; Damping; Educational institutions; Glass; Micromechanical devices; Resonant frequency; Substrates; Capacitors; Finite element; Gyroscope; Tuning fork;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology (ECTI-CON), 2011 8th International Conference on

Conference_Location

Khon Kaen

Print_ISBN

978-1-4577-0425-3

Type

conf

DOI

10.1109/ECTICON.2011.5947760

Filename

5947760