Title :
The accurate measurement of a micromechanical force using force-sensitive capacitances
Author :
Wolffenbuttel, M.R. ; Regtien, P.P.L.
Author_Institution :
Delft Univ. of Technol., Netherlands
fDate :
June 27 1994-July 1 1994
Abstract :
A sensor for the precise and accurate measurement of micro-mechanical forces is presented. The sensor is used to detect a tactile image and has capacitive force sensing elements which are detected by charge readout. The mechanical performance of the force sensor is evaluated and verified with experiments. The force-to-deflection and deflection measurements have been separated in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm/sup 2/ in size, it has a force range of 0.25 mN and a capacitance of 2 pF. The amplifier detects capacitance changes of 15 fF with a maximum non-linearity of 0.01% over the 1.25-2.5 pF range.<>
Keywords :
capacitance; electric sensing devices; force measurement; micromechanical devices; tactile sensors; 1.25 to 2.5 pF; 15 fF; amplifier; capacitative force sensor; charge readout; deflection measurements; fringe fields; linear response; mechanical performance; micromechanical force measurement; nonlinearity; tactile image detection; Biomembranes; Capacitance measurement; Capacitive sensors; Electrodes; Force measurement; Force sensors; Mechanical sensors; Micromechanical devices; Springs; Tactile sensors;
Conference_Titel :
Precision Electromagnetic Measurements, 1994. Digest., 1994 Conference on
Conference_Location :
Boulder, CO, USA
Print_ISBN :
0-7803-1984-2
DOI :
10.1109/CPEM.1994.333271
