Title :
MEMS-based handheld single-axis confocal microscope design and experiment
Author :
Chantakien, Techaniti ; Raphisak, Pisut ; Kumazawa, I. ; Piyawattanametha, Wibool
Author_Institution :
Dept. of Electr. Eng., Kasetsart Univ., Bangkok, Thailand
Abstract :
We demonstrate an optical configuration of MEMS based a single-axis confocal microscope imaging setup with 12.7 millimeters diameter commercial lenses. The configuration deploys lens models of optical design software, ZEMAX, to predict optical performance of the actual imaging setup. With this optical design, the maximum field of view is 150 μm × 30 μm with 11.96 μm transverse resolutions and 1.98 mm axial resolution.
Keywords :
lenses; micro-optomechanical devices; optical microscopes; optical scanners; MEMS; commercial lens; handheld single axis confocal microscope design; optical configuration; size 12.7 mm; Collimators; Image resolution; Micromechanical devices; MEMS; reflectance microscope; single-axis confocal (SAC) microscopy;
Conference_Titel :
Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology (ECTI-CON), 2011 8th International Conference on
Conference_Location :
Khon Kaen
Print_ISBN :
978-1-4577-0425-3
DOI :
10.1109/ECTICON.2011.5947765
