DocumentCode
2184035
Title
MEMS-based handheld single-axis confocal microscope design and experiment
Author
Chantakien, Techaniti ; Raphisak, Pisut ; Kumazawa, I. ; Piyawattanametha, Wibool
Author_Institution
Dept. of Electr. Eng., Kasetsart Univ., Bangkok, Thailand
fYear
2011
fDate
17-19 May 2011
Firstpage
38
Lastpage
41
Abstract
We demonstrate an optical configuration of MEMS based a single-axis confocal microscope imaging setup with 12.7 millimeters diameter commercial lenses. The configuration deploys lens models of optical design software, ZEMAX, to predict optical performance of the actual imaging setup. With this optical design, the maximum field of view is 150 μm × 30 μm with 11.96 μm transverse resolutions and 1.98 mm axial resolution.
Keywords
lenses; micro-optomechanical devices; optical microscopes; optical scanners; MEMS; commercial lens; handheld single axis confocal microscope design; optical configuration; size 12.7 mm; Collimators; Image resolution; Micromechanical devices; MEMS; reflectance microscope; single-axis confocal (SAC) microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology (ECTI-CON), 2011 8th International Conference on
Conference_Location
Khon Kaen
Print_ISBN
978-1-4577-0425-3
Type
conf
DOI
10.1109/ECTICON.2011.5947765
Filename
5947765
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