Title :
Mass Sensor Based on Thin Film Bulk Acoustic Resonator
Author_Institution :
Comput. & Inf. Eng. Coll., Zhejiang Gongshang Univ., Hangzhou, China
Abstract :
A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor´s Q factor is above 610 and resonance frequency is about 1608 MHz. This FBAR sensor is applied as humidity sensor. The reproducibility of this sensor´ SI land Q factor are evaluated.
Keywords :
acoustic resonators; crystal resonators; etching; humidity sensors; thin films; Agilent Vector network analyer; FBAR sensor; back-etch structure; humidity sensor; mass sensor; sensor Q factor; standard MEMS process; thin film bulk acoustic resonator; Acoustic measurements; Acoustic sensors; Film bulk acoustic resonators; Humidity; Measurement standards; Micromechanical devices; Q factor; Resonance; Resonant frequency; Thin film sensors;
Conference_Titel :
Biomedical Engineering and Informatics, 2009. BMEI '09. 2nd International Conference on
Conference_Location :
Tianjin
Print_ISBN :
978-1-4244-4132-7
Electronic_ISBN :
978-1-4244-4134-1
DOI :
10.1109/BMEI.2009.5305157
