Automated generation and parameterization of throughput models for semiconductor tools

Cluster tools play an important role in modern semiconductor fabs. Due to their complexity in configuration and their varying material flow, the creation of accurate throughput models for cluster tools is a demanding task. Proposed analytical approaches are either quite intricate and require manual maintenance process, or are inexact due to reliance on lot-level events. This paper presents an approach for the automated generation and parameterization of detailed cluster tool models based on bottleneck analysis. Equipment configuration as well as all throughput model base data is extracted from recent equipment reporting data.