Title :
Integrated thin-film micropotentiometers
Author :
Kinard, J.R. ; Huang, D.X. ; Novotny, D.B.
Author_Institution :
Electr. Div., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fDate :
June 27 1994-July 1 1994
Abstract :
Integrated micropotentiometers, new devices fabricated with thin-film technology and the micromachining of silicon, have been developed for the accurate determination of ac voltage from 1 to 200 mV up to 100 kHz and with the potential for higher frequencies.<>
Keywords :
calibration; elemental semiconductors; integrated circuit technology; measurement standards; potentiometers; silicon; thin film resistors; voltage measurement; 1 to 200 mV; 100 kHz; Si; ac voltage; integrated thin-film micropotentiometers; micromachining; thin-film technology; Biomembranes; Current measurement; Frequency; Micromachining; Resistors; Semiconductor thin films; Silicon; Skin effect; Transistors; Voltage;
Conference_Titel :
Precision Electromagnetic Measurements, 1994. Digest., 1994 Conference on
Conference_Location :
Boulder, CO, USA
Print_ISBN :
0-7803-1984-2
DOI :
10.1109/CPEM.1994.333347
