Title :
A new method to measure silicon lattice spacings and possible new definition of the kilogram: scheme and progress
Author :
Wei-Tou Ni ; Jia-Ruey Duann ; Gwo-Sheng Peng ; Hsien-Fen Hsieh ; Chung-Ping Lai ; King-Hung Lee ; Yeou-Song Lee ; Fu-Jeng Lin ; Huay-Chung Liou ; Sheau-shi Pan ; Chien-Ming Wu ; Hsien-Chi Yeh ; Mei-yun Yeh
Author_Institution :
Center for Meas. Stand., Ind. Technol. Res. Inst., Hsinchu, Taiwan
fDate :
June 27 1994-July 1 1994
Abstract :
For possible new definition of the kilogram, we propose to use picometer metrology and AFM to continuously scan with atomic resolution a surface strip of about 2 nm/spl times/10 mm area on a single silicon crystal in a 2/spl times/10/sup -11/ torr vacuum chamber to measure silicon lattice spacings to 0.1-1 ppb.<>
Keywords :
atomic force microscopy; elemental semiconductors; lattice constants; mass measurement; silicon; units (measurement); 10 nm; 2 nm; 2*10/sup -11/ torr; AFM; Si; Si lattice spacings; X-ray wavelength; atomic resolution; kilogram; picometer metrology; surface strip; Atom optics; Atomic beams; Atomic force microscopy; Atomic measurements; Lattices; Metrology; Optical feedback; Probes; Silicon; Strips;
Conference_Titel :
Precision Electromagnetic Measurements, 1994. Digest., 1994 Conference on
Conference_Location :
Boulder, CO, USA
Print_ISBN :
0-7803-1984-2
DOI :
10.1109/CPEM.1994.333369
