Title :
Device Research Conference (Cat. No.02TH8606)
Abstract :
Presents the front cover and table of contents from the conference proceedings.
Keywords :
CMOS integrated circuits; MOSFET; dielectric thin films; heterojunction bipolar transistors; high electron mobility transistors; micromechanical devices; nanoelectronics; semiconductor technology; tunnel transistors; CMOS technology; DHBT; HEMT; HFET; III-V devices; MEMS; MOS dielectrics; MOSFET; Si; Si-based devices; nanoscale devices; nitride electronic devices; semiconductor devices; tunnelling devices;
Conference_Titel :
Device Research Conference, 2002. 60th DRC. Conference Digest
Conference_Location :
Santa Barbara, CA, USA
Print_ISBN :
0-7803-7317-0
DOI :
10.1109/DRC.2002.1029482
