Title :
Bio-MEMS - the impact of MEMS on biotechnology in the 21/sup st/ century
Author :
Madou, M. ; Gurtner, C.
Author_Institution :
Nanogen, San Diego, CA, USA
Abstract :
This paper gives a broad overview of developments in the miniaturization of manufacturing processes. The following topics are covered: nanochemistry; nanofabrication; biomimetics; MEMS; parallel and molecular self-assembly; biotechnology; molecular diagnostics; biosensors and microsensors.
Keywords :
biomimetics; biosensors; biotechnology; micromechanical devices; microsensors; nanotechnology; self-assembly; MEMS; bio-MEMS review; biomimetics; biotechnology; manufacturing process miniaturization; microsensors; molecular diagnostics; nanochemistry; nanofabrication; parallel/molecular self-assembly; Actuators; Amino acids; Biosensors; Biotechnology; DNA; Fluorescence; Manufacturing processes; Micromechanical devices; Microsensors; Protein engineering;
Conference_Titel :
Device Research Conference, 2002. 60th DRC. Conference Digest
Conference_Location :
Santa Barbara, CA, USA
Print_ISBN :
0-7803-7317-0
DOI :
10.1109/DRC.2002.1029487