Title :
Proposal of N-channel heterostructure dynamic threshold-voltage MOSFET (HDTMOS) with P-type doped SiGe body
Author :
Kawashima, T. ; Takagi, T. ; Hara, Y. ; Kanzawa, Y. ; Inoue, A. ; Sorada, H. ; Nozawa, K. ; Asai, A. ; Ohnishi, T. ; Kubo, M.
Author_Institution :
Adv. Technol. Res. Lab., Matsushita Electr. Ind. Co. Ltd., Osaka, Japan
Abstract :
In this work, we have focused on boosting the performance of the N-channel DTMOS which is promising for low-power analogue/RF circuits. Since the band offset appears mainly at the valence band and there is no conduction band offset in the Si/SiGe heterostructures, it is impossible to improve the performance of N-HDTMOS by the same approach as P-HDTMOS. As an alternative approach using heterojunction band engineering, we have proposed a novel N-channel HDTMOS technology for the first time.
Keywords :
Ge-Si alloys; MOSFET; semiconductor materials; N-channel heterostructure dynamic threshold-voltage MOSFET; P-type doped SiGe body; Si-SiGe; Si/SiGe heterostructure; band offset; heterojunction band engineering; Application specific integrated circuits; Body regions; Doping; Germanium silicon alloys; Heterojunctions; MOSFET circuits; Power MOSFET; Proposals; Silicon germanium; Threshold voltage;
Conference_Titel :
Device Research Conference, 2002. 60th DRC. Conference Digest
Conference_Location :
Santa Barbara, CA, USA
Print_ISBN :
0-7803-7317-0
DOI :
10.1109/DRC.2002.1029502